Silicon photonics Reactive magnetron sputtering Semiconductors Rare earths Luminescence Microstructure physique Computational electromagnetic methods Erbium Thin film Infrared absorption Fluorescence Silicon nanoclusters Feature erasure Optical amplifiers Atom probe tomography Nanoparticules Copper Si nanocluster ADE-FDTD CO adsorption Nanostructure SiC Photovoltaic Silicon nanocrystals Hafnium silicate Energy transfer Photoluminescence Electroluminescence Guide d'onde M-lines Si-rich silicon oxide Doping Crystal structure Hillocks Couches minces Hybrid materials Nanostructures High-k dielectrics Neodymium Rare-earth ions Films Microstructure Couches minces semi-conductrices Waveguides Nanoparticles Liposomes Sputtering Conductivity Terbium AFM Cerium Epitaxy Oxides GENOMIQUE PZT Terres rares Hafnium silicates Multilayers Raman Down-conversion MoS2 Radiofrequency magnetron sputtering Magnetron sputtering Pulvérisation cathodique Pulsed laser deposition Optical properties Microstructure physics Nanostructuring Irradiation HR STEM-HAADF Laser pyrolysis Electron paramagnetic resonance Refractive index Silicon Nanostructured materials Lifetime Raman scattering Waveguide CoMoS Structural properties Oxide materials Al2O3 Cathodoluminescence XRD Quantum-well IR spectroscopy Grazing incidence X-ray diffraction Silicium Citric acid Rare earth Matériaux hybrides FTIR Pulvérisation magnétron radiofréquence Friction Oxide interface Phase transition Silicon nitride Thin films RF magnetron sputtering Oxygen vacancies